Mass Production of Large-Size GaAs Wafers at FREIBERGER

A. Kleinwechter, T. Bünger, T. Flade, M. Jurisch, A. Köhler
U. Kretzer, A. Seidl, B. Weinert
Freiberger Compound Materials GmbH
 
The paper presents FREIBERGER's recent achievements in mass production of 150 mm wafers both by LEC and VGF growth.

A simple biaxial stress test has been used to evaluate breakage behaviour of LEC and VGF wafers as well as the influence of laser marking on breakage.