Manufacturing 6" GaAs substrates by the VB method

Y.Hagi, R.Nakai, S.Ohtani, S.Kawarabayashi, K.Nanbu, S.Sawada
T.Morimoto, H.Yao, T.Ueda, T.Sakurada, S.Nakajima
Sumitomo Electric Industries, Ltd.

Manufacturing systems for producing 6" GaAs substrates are refined by optimizing the Vertical Boat (VB) method and the wafer polishing process. Introduction of low cost facilities leads to reduced manufacturing cost. The Taguchi method assists in the design of a furnace structure with a stable thermal environment and polishing conditions resulting in stable surface quality. New production facilities have been constructed while maintaining consistent quality.