A Mixed GaAs Modulator and HEMT MMIC Process Line On 150mm Wafers

J. Thompson, D.J. Warner, C.L. Sansom, P.A. Claxton & D. Parker
Marconi Caswell Limited

This paper describes the establishment of a 150mm wafer fab to process both GaAs optical modulators and pseudomorphic HEMT MMICs in the same facility.