Metal particle effects on thin film capacitors in high volume manufacturing
Muralidhar R. Rao, Sheila T. O'Neil, Shiban Tiku
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Keywords: Thin film capacitors, particles, microwave integrated circuits, power amplifiers, breakdown voltage
The effect of metal particles on thin film dielectric capacitors is characterized. Electrical characteristics of statistically significant numbers of capacitors are measured. A figure of merit is derived from the cumulative distribution of capacitor burnout voltages. The figure of merit is correlated with the number of particles per wafer. The use of the figure of merit in establishing process consistency and reproducibility is demonstrated.