Stress and Other Challenges with Evaporated Ni-Cr Thin Film Resistors Used in the Manufacture of ASICs

Necmi Bilir and Long Do

Skyworks Solutions, Inc., Sunnyvale Operations

1230 Bordeaux Drive, Sunnyvale, CA 94089

 

Keywords: thin film resistor, resistivity, Ni-Cr, TaN, stress

 

SUMMARY:

This paper studied the change in the characteristics of the Ni-Cr thin film resistors developed at the Sunnyvale facility of Skyworks Solutions,(formerly known as NDI-Alpha Industries), with the number of depositions from the same source melt, as well as the effects of sputter etch cleaning, oxygen plasma etch, HCl dip and regular annealing. were deposited in the later runs, came up very seldom, if ever.

 

 

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