Toward the Development of Hybrid MEMS Tunable Optical Filters and Lasers
M.C. Harvey1,4, E.M. Ochoa2,3, J.A. Lott2, T.R. Nelson1, Jr.
1Air Force Research Laboratory, Sensors
2Air Force Institute of Technology Dept. of Electrical and Computer Engineering, Wright-Patterson AFB, OH 45433
3Air force Research Laboratory, Space Vehicles Directorate, Kirtland AFB, NM 87117
Keywords: Flip-chip integration, tunable vertical-cavity surface-emitting lasers, tunable optical filters, MEMS devices, plasma-enhanced chemical vapor deposition; molecular beam epitaxy, Bragg mirror
There is strong interest in the development of tunable lasers and optical filters for a number of optoelectronic applications. From a telecommunications standpoint, compact, efficient, and affordable tunable sources and filters could find immediate widespread use for wavelength division multiplexing (WDM) systems, enabling incredibly dense optoelectronic communications over a single optical fiber. From a military standpoint, robust tunable sources would readily be inserted into platforms requiring fixed-wavelength optical pumps (such as for fiber amplifiers or atomic clock systems) or for hyperspectral imaging systems that require stable, pixilated filter elements.