GaAs HBT wet etch processing using reclaimed chemicals

M. Ghosh*, K. Xie, I. Black

ANADIGICS, 141 Mt. Bethel Rd., Warren, NJ 07059, USA

mghosh@anadigics.com; kxie@anadigics.com; iblack@anadigics.com; 908-668-5000

 

Keywords: GaAs, HBT, Chemical Etch, Recycling Chemical, Wafer Fabrication

 

Abstract

Chemical costs can be a significant part of semiconductor manufacturing materials cost.  True chemical cost consists of raw chemical price, handling expenses and disposal of used chemicals.  Some of this usage can be put back by recycling the chemicals for re-use.  This paper describes the work done to establish the use of recycled chemical for etch processing during Gallium Arsenide Hetero-junction Bipolar Transistors (GaAs HBT) fabrication

 

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