SiN Capacitors and ESD
TriQuint Semiconductor, 500 W Renner Road, Richardson, TX 75080, Email: firstname.lastname@example.org, Phone: (972) 994-5766
We present Human Body Model (HBM) electrostatic discharge (ESD) test results for the three types of capacitors used in the TriQuint Texas high density interconnect process. We show a linear dependence of ESD failure voltage with respect to capacitor area (capacitance). We also show doubling of the HBM failure voltage when using two capacitors in series compared to a single capacitor of the same type with the same total capacitance. Surprisingly high HBM failure voltages were observed for large 500 Å SiN capacitors. Transient simulations were performed to relate the observed HBM failure voltages to the intrinsic dielectric breakdown voltages of the three types of capacitors. By incorporating a dielectric current leakage due to Frenkel-Poole emission from traps into the simulations, we were able to obtain an excellent agreement with the HBM test results.