High Value Thin Film Resistor for GaAs IC Manufacturing

 

Fabian Radulescu1, Jinhong Yang1, Paul Miller1, Ron Herring1, Chi-Fung Lo2, Wolfgang Liebl3

 

 

1TriQuint Semiconductor, 2300 NE Brookwood Parkway, Hillsboro, OR 97124, fradulescu@tqs.com, ph: 503-615-9443

2 Praxair Surface Technology MRC, Orangeburg, NY

3 Now with Infineon Technologies AG, Germany

 

 

Keywords: Thin Film Resistor, WSi, Resistivity, TCR

 

Abstract

An optimized thin film resistor based on a sputtered WSix alloy has been developed. Sheet resistance of 1000 W/ and a temperature coefficient of resistivity (TCR) of -650 ppm/oC have been measured. When subjected to reliability tests, the new resistor exhibits good sheet resistance and TCR stability. Initial results from the pilot line demonstrate that this film can be integrated into a repeatable and uniform manufacturing process.

 

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