Terry Daly, Jason Fender, Agni Mitra, Matt Parker, Darrell Hill, and Adolfo Reyes
Freescale Semiconductor, Inc. Tempe Fab 2100 E. Elliot Road, Tempe, AZ, 85284 email@example.com; firstname.lastname@example.org; email@example.com; firstname.lastname@example.org; email@example.com; firstname.lastname@example.org
Keywords: HBT, base ideality, metal liftoff, surface cleans
For both commercial and industrial applications, HBT intrinsic reliability requires that performance does not degrade with time. Long-term reliability has been associated with low-voltage base current [1, 2], of which one source is base ideality. This paper explores factors affecting surface cleanliness and their influence on base ideality, including base metal evaporation and post-metal liftoff cleans.