Computer Integrated Manufacturing in smaller GaAs Fabs

T. Sterk, C. Denton, N. Naul

TriQuint Semiconductor, 500 W. Renner Road, Richardson, TX 75080
Email: tsterk@tqs.com, Phone: 972-994-3610

Key words: MES, CIM, Yield Improvement

ABSTRACT

GaAs semiconductor manufacturing Fabs historically don’t have the automation budget of larger Silicon Semiconductor companies to buy the latest software or tools to build their wafers. So, how does a smaller, budget constrained, Fab improve productivity and yields? They use CIM (Computer Integrated Manufacturing)!

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