High Voltage Capacitors with Increased Lifetimes Using SiN Dielectrics
Keywords: Capacitor, SiN, dielectric, breakdown, lifetime
We present ramped voltage data from a new nitride used in our fabrication process. Using the same fabrication flow, we measured increased lifetimes for capacitors using this new dielectric. Using the linear field model, this translates into capacitors that can sustain higher applied voltages before they fail.