Automation for Better Fab Efficiency

 

Nirav Thakkar, Doug Beasley, Alma Lopez, Glenn Hafer

Skyworks Solutions, Newbury Park, CA 91320

nirav.thakkar@skyworksinc.com (805) 480-4325

 

Keywords: CIM, Factory Automation, Recipe Download, SECS, GEM, Barcode

 

Abstract

Factory automation in compound semiconductor manufacturing is usually seen as just a tool to prevent

mis-processing of wafers for loading the wrong recipe. Not all tools are capable of automation (SECS/GEM interface) though. This paper demonstrates how Skyworks Newbury Park has achieved factory automation on several toolsets that are not SECS/GEM capable. In addition, this paper also demonstrates how we have applied automation to save engineering and management time, provide required data for process enhancements and troubleshooting process or equipment problems, improve throughput, and more through various home grown software applications, resulting in improved fab efficiency and better quality products.

 

 

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