Reliability Qualification Challenges of a pHEMT-HBT Hybrid Process

Dorothy June M. Hamada and William J. Roesch
TriQuint Semiconductor Inc., 2300 NE Brookwood Parkway, Hillsboro, OR 97124-5300
Phone: (503) 615-9298 Fax: (503) 615-8903 Email: dhamada@tqs.com

Abstract

The purpose of this investigation is to describe the methodology of reliability qualification of a process that includes two types of transistors and the unique aspects of the combination of these technologies in a hybrid process. Special aspects of performing reliability qualification on a complex process are discussed in general. Methodology of process qualification and some unique findings are described.

Paper 11b.1.pdf