Waste Minimization, Pollution Prevention and Resource Recovery at a GaAs Manufacturer

By: Erich Burke, PE
Sr. Environmental Engineer, RF Micro Devices, 7628 Thorndike Road, Greensboro, NC 28659, (336)-931-8024, eburke@rfmd.com

Keywords: waste minimization, pollution prevention, resource recovery, recycling, gallium, precious metals, water consumption

Abstract

This extended abstract examines strategies and technologies to minimize the environmental footprint of Compound Semiconductor Manufacturing Operations and ways to recover and recycle commodities to contain cost and secure limited resources.

Paper 12a.4.pdf