Overall Equipment Efficiency Improvement for GaAs Fab Evaporators

Jesus Teran, Daniel Weaver, Heather Knoedler, Lam Luu, Richard Bingle, Brian Alvarez, Joshua Doria, David Holzman, Juan Velasquez.
jesus.teran@skyworksinc.com
Skyworks Solutions, Inc., Newbury Park, CA 91320

Keywords: OEE, efficiency improvement

Abstract
This paper reviews how six sigma methodology principles and total preventive maintenance (TPM) drains analysis have been utilized to increase overall equipment effectiveness (OEE) on the metal deposition operation in our GaAs wafer fab.

Paper 7a.2.pdf