Contactless Room Temperature Characterization of PHEMT Structures Using Surface Photovoltage Spectroscopy
M. Leibovitch, I. Hallakoun, S. Solodky, N. Ashkenasy, G.
Bunin, Y. Rosenwaks, Yoram Shapira
ELTA Electronics Industries Ltd., P.O.B 330, Ashdod 77102 Israel
Department of Physical Electronics, Faculty of Engineering, Tel-Aviv University, Ramat-Aviv 69978, Israel
Surface photovoltage spectroscopy has been used for characterization of PHEMT structure. The spectra have been found to be dominated by the electric fields in the structure. These fields are determined by the delta doping levels and by the surface and interface charge densities. A simple empirical model has been developed and used for monitoring changes in the structure growth parameters and surface conditions.