Cost-Effective Yield Enhancement in 6" Gallium Arsenide Wafer Manufacturing

P. Bohlinger1, Y. Z. Wang1, T. McGuine2 and C. Nielsen2
2August Technology

In this paper, we reported a cost effective yield enhancement methodology in our 6-inch Gallium Arsenide wafer fab using the August NSX system and in-house developed defect correlation program. An automated defect detection and analysis system has been developed to monitor process and defect excursions at the critical process levels. The inspection results are correlated to diesort yield and parametric results to foster continuous improvement. Several successful yield improvements have been achieved in our wafer fab with the implementation of the yield enhancement methodology.