Innovative Metal Lift-off Process Using Dry Carbon Dioxide

Paul Miller, Doug Price
TriQuint Semiconductor

Marjorie Burtch, Charles Bowers
Eco-Snow Systems
The Eco-Snow 'dry' carbon dioxide process is investigated as a replacement for conventional solvent and de-ionized water spray techniques for metal lift-off process steps. Results show wafer yield improved as a result of reduced electrical degradation and particle density. We also observe reduced contact resistance between the interconnect metal and ohmic metal layers of greater than 20%.