Toward the Development of Hybrid MEMS Tunable Optical Filters and Lasers

M.C. Harvey1,4, E.M. Ochoa2,3, J.A. Lott2, T.R. Nelson1, Jr.

1Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH 45433

2Air Force Institute of Technology Dept. of Electrical and Computer Engineering, Wright-Patterson AFB, OH 45433

3Air force Research Laboratory, Space Vehicles Directorate, Kirtland AFB, NM 87117

4Space and Missile Systems Center, Detachment 3, Peterson AFB, CO 80914


Keywords: Flip-chip integration, tunable vertical-cavity surface-emitting lasers, tunable optical filters, MEMS devices, plasma-enhanced chemical vapor deposition; molecular beam epitaxy, Bragg mirror



There is strong interest in the development of tunable lasers and optical filters for a number of optoelectronic applications.  From a telecommunications standpoint, compact, efficient, and affordable tunable sources and filters could find immediate widespread use for wavelength division multiplexing (WDM) systems, enabling incredibly dense optoelectronic communications over a single optical fiber. From a military standpoint, robust tunable sources would readily be inserted into platforms requiring fixed-wavelength optical pumps (such as for fiber amplifiers or atomic clock systems) or for hyperspectral imaging systems that require stable, pixilated filter elements.



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