Low-k Underfill Using Spray Coat Technology
Brubaker*, M. Wimplinger*, G. Mittendorfer**, C. Thanner**
*EV Group Inc. 3701 E. University Dr. STE 300,
**EV Group DI Erich Thallner Strasse 1, A-4780
Keywords: Photoresist, Spray, Coating, BCB, Air Bridge, Low-k
The purpose of this extended abstract is to present a new application of spray coating process which greatly improves the process of performing underfill of suspended structures (air bridges) with low-k polymer. By using spray coating, it is possible to realize as much as a nine-fold materials savings, plus a three fold time savings. This article describes the spray coating process, and how it applies to the underfill process.