Low-k Underfill Using Spray Coat Technology

Brubaker*, M. Wimplinger*, G. Mittendorfer**, C. Thanner**

*EV Group Inc. 3701 E. University Dr. STE 300, Phoenix, AZ  85034 Phone: (602) 437-9492

*Emails: c.brubaker@evgroup.com; m.wimplinger@evgroup.com

**EV Group DI Erich Thallner Strasse 1, A-4780 Scharding, Austria Phone: +43-7712-5311

**Emails: G.Mittendorfer@evgroup.com; c.thanner@evgroup.com


Keywords: Photoresist, Spray, Coating, BCB, Air Bridge, Low-k



The purpose of this extended abstract is to present a new application of spray coating process which greatly improves the process of performing underfill of suspended structures (air bridges) with low-k polymer.  By using spray coating, it is possible to realize as much as a nine-fold materials savings, plus a three fold time savings.  This article describes the spray coating process, and how it applies to the underfill process.



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