Determining Inductor Interactions with a Design of Experiment
M. Meeder, M. Fresina, D. Limanto, M. Tenberge, W. Wohlmuth, Y. Tretiakov, and K. Sheek.
RF Micro Devices, Inc.
A method of designing higher quality (Q) factor inductors is demonstrated in this paper. The method is based on optimizing the fab process for a certain device design. The method can be applied to any IC process. The optimization method shows where the process limits are with respect to a certain device. The analysis shows where process improvements can be made to achieve the desired inductor.