Determining Inductor Interactions with a Design of Experiment

M. Meeder, M. Fresina, D. Limanto, M. Tenberge, W. Wohlmuth, Y. Tretiakov, and K. Sheek.

RF Micro Devices, Inc. 7628 Thorndike Rd. Greensboro, NC 27409. 

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A method of designing higher quality (Q) factor inductors is demonstrated in this paper.  The method is based on optimizing the fab process for a certain device design.   The method can be applied to any IC process.  The optimization method shows where the process limits are with respect to a certain device.  The analysis shows where process improvements can be made to achieve the desired inductor.


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