High Value Thin Film Resistor for GaAs IC Manufacturing


Fabian Radulescu1, Jinhong Yang1, Paul Miller1, Ron Herring1, Chi-Fung Lo2, Wolfgang Liebl3



1TriQuint Semiconductor, 2300 NE Brookwood Parkway, Hillsboro, OR 97124, fradulescu@tqs.com, ph: 503-615-9443

2 Praxair Surface Technology MRC, Orangeburg, NY

3 Now with Infineon Technologies AG, Germany



Keywords: Thin Film Resistor, WSi, Resistivity, TCR



An optimized thin film resistor based on a sputtered WSix alloy has been developed. Sheet resistance of 1000 W/ and a temperature coefficient of resistivity (TCR) of -650 ppm/oC have been measured. When subjected to reliability tests, the new resistor exhibits good sheet resistance and TCR stability. Initial results from the pilot line demonstrate that this film can be integrated into a repeatable and uniform manufacturing process.


6B.pdf Return to TOC