Effective Manufacturing Utilizing Mass Metrology
Keywords: Mass Metrology, Density, BAW Resonator, Yield, Process Control
In modern manufacturing, measurement decisions are critical to successfully identifying and eliminating sources of process variability. The increasing complexity of today’s technology often leads to the implementation of very complex and advanced analytical metrology techniques into the volume production environment. These can be slow and expensive. In this paper it will be shown how mass metrology effectively meets the challenges in quantifying manufacturing variability. Mass change is a measure of process performance, capturing information that a single parameter measurement, such as thickness will not.