<?xml version="1.0" encoding="UTF-8"?><?xml-stylesheet type="text/xsl" href="//csmantech.org/wp-content/plugins/wordpress-seo/css/main-sitemap.xsl"?>
<urlset xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:image="http://www.google.com/schemas/sitemap-image/1.1" xsi:schemaLocation="http://www.sitemaps.org/schemas/sitemap/0.9 http://www.sitemaps.org/schemas/sitemap/0.9/sitemap.xsd http://www.google.com/schemas/sitemap-image/1.1 http://www.google.com/schemas/sitemap-image/1.1/sitemap-image.xsd" xmlns="http://www.sitemaps.org/schemas/sitemap/0.9">
	<url>
		<loc>https://csmantech.org/paper/2-1-two-inch-high-quality-diamond-heteroepitaxial-growth-on-sapphire-for-power-devices/</loc>
		<lastmod>2023-09-18T18:34:54+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-2-epitaxy-equipment-towards-a-billion-dollar-mark/</loc>
		<lastmod>2023-09-18T18:36:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-3-advanced-mocvd-technology-for-rf-hemt-growth-on-semi-standard-large-area-111-silicon-substrates/</loc>
		<lastmod>2023-09-18T18:38:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6275/</loc>
		<lastmod>2023-09-18T18:40:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-2-rising-mm%e2%80%90wave-era-for-sensing-networking-with-multi%e2%80%90facet-system-technology-challenges/</loc>
		<lastmod>2023-09-18T18:45:35+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-3-3-4-3-8-ghz-20w-compact-2-stage-gan-hemt-power-amplifier-using-ipd-on-hpsi-sic-substrate/</loc>
		<lastmod>2023-09-18T18:47:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-4-100-v-gan-hemt-technology-with-record-high-efficiency-at-c-band-frequencies/</loc>
		<lastmod>2023-09-18T18:49:30+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-1-productive-4-0-a-holistic-innovation-project-meant-to-open-the-potentials-of-digital-industry-thomas-gutt/</loc>
		<lastmod>2023-09-18T18:50:43+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-2-machine-learning-based-methods-for-in-time-monitoring-equipment-conditions-wei-you-chen/</loc>
		<lastmod>2023-09-18T19:05:30+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-3-transfer-of-the-afrl-0-14-%ce%bcm-algan-gan-on-sic-mmic-process-to-macoms-commercial-fab/</loc>
		<lastmod>2023-09-18T19:07:00+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-4-improving-manufacturability-of-highly-scaled-rf-gan-hemts/</loc>
		<lastmod>2023-09-18T19:08:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-5-electrical-characteristics-of-wavice-gan-hemt-on-4-sic-with-0-2-%ce%bcm-gate-process-for-x-and-ku-band-applications/</loc>
		<lastmod>2023-09-18T19:10:40+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-1-iii-v-semiconductor-devices-on-6-inch-wafer-for-sub-terahertz-communications/</loc>
		<lastmod>2023-09-18T19:11:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-2-gaassb-inp-dhbt-extrinsic-base-regrowth-using-in-situ-hydrogen-plasma-surface-treatment-and-molecular-beam-epitaxy/</loc>
		<lastmod>2023-09-18T19:13:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-3-normally-off-inaln-gan-hemts-fabricated-by-atomic-layer-etching-gate-recess/</loc>
		<lastmod>2023-09-18T19:18:34+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-4-effects-of-deposition-rate-beam-sweep-and-crucible-in-an-evaporation-process/</loc>
		<lastmod>2023-09-18T19:20:12+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-5-optimizing-process-conditions-for-high-uniformity-and-stability-of-tantalum-nitride-films-stephanie-chang-shiban-tiku-and-lam-luu-henderson/</loc>
		<lastmod>2023-09-18T19:21:53+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6327/</loc>
		<lastmod>2023-09-18T19:26:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-3-foundry-based-optical-components-changing-the-world/</loc>
		<lastmod>2023-09-18T19:28:00+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-4-impact-of-strain-induced-bow-on-the-manufacture-of-vcsels-on-150mm-gaas-and-ge-substrate-wafers/</loc>
		<lastmod>2023-09-18T19:34:37+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-1-microled-display-technology-and-applications-status/</loc>
		<lastmod>2023-09-18T19:35:51+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-2-leveraging-microled-display-technology-to-solve-the-chip-to-chip-data-communication-bottleneck/</loc>
		<lastmod>2023-09-18T19:37:05+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-3-reliability-assessment-of-940-nm-vcsel-array-based-on-pulsed-mode-thermal-analysis/</loc>
		<lastmod>2023-09-18T19:38:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-1-sic-device-manufacturing-and-road-to-volume-production/</loc>
		<lastmod>2023-09-18T19:43:37+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-2-how-to-unleash-power-of-ga2o3/</loc>
		<lastmod>2023-09-18T20:00:22+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-3-device-figure-of-merit-performance-of-scaled-gamma-gate-%ce%b2-ga2o3-mosfets/</loc>
		<lastmod>2023-09-18T20:01:54+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-4-rise-and-rise-of-sic-and-gan-in-power-electronic-industry/</loc>
		<lastmod>2023-09-18T20:03:25+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/high-power-gan-based-laser-diodes-for-next-generation-applications/</loc>
		<lastmod>2023-09-18T20:04:57+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/first-demonstration-of-high-performance-940nm-vcsels-grown-on-200mm-diameter-substrates/</loc>
		<lastmod>2023-09-18T20:10:33+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/etching-of-gaas-algaas-vcsel-mesa-for-high-volume-production/</loc>
		<lastmod>2023-09-18T20:11:44+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/impact-of-diffusion-mask-strain-on-impurity-induced-disordered-vcsels-designed-for-single-fundamental-mode-operation/</loc>
		<lastmod>2023-09-18T20:13:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/single-crystal-alscn-on-silicon-xbaw-rf-filter-technology-for-wide-bandwidth-high-frequency-5g-and-wifi-applications/</loc>
		<lastmod>2023-09-18T20:14:33+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/optimization-of-gan-rf-switch-device-performance-using-afrl-gan140-mmic-process/</loc>
		<lastmod>2023-09-18T20:18:10+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/aln-gan-ingan-coupling-channel-hemts-with-improved-ss-performance/</loc>
		<lastmod>2023-09-18T20:19:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6480/</loc>
		<lastmod>2023-09-18T20:24:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/design-and-manufacture-of-edge-termination-in-vertical-gan-diodes-electric-field-distribution-probed-by-second-harmonic-generation/</loc>
		<lastmod>2023-09-18T20:25:58+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/reliability-without-hermeticity-rwoh-protection-for-slcfet-switch-technology/</loc>
		<lastmod>2023-09-18T20:27:21+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/1e7-hours-mttf-at-200c-of-100v-rf-algan-gan-sic-hemt-through-alt-characterization/</loc>
		<lastmod>2023-09-18T20:28:32+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/micro-transfer-printing-for-micro-assembly-of-heterogeneous-integrated-compound-semiconductor-components/</loc>
		<lastmod>2023-09-18T20:30:02+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/differences-in-sic-wafer-thermal-conductivity-from-face-to-face-dependent-on-polishing/</loc>
		<lastmod>2023-09-18T20:31:56+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/a-novel-photosensitive-permanent-bonding-material-designed-for-polymer-metal-hybrid-bonding-applications/</loc>
		<lastmod>2023-09-18T20:33:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/novel-thermoreflectance-based-method-for-in-situ-die-attach-thermal-conductivity-assessment-in-packaged-devices/</loc>
		<lastmod>2023-09-18T20:34:16+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/propelling-the-power-electronics-revolution-200-mm-diameter-100-v-to-1800-v-and-beyond-gan-on-qst-high-volume-device-manufacturing-platform/</loc>
		<lastmod>2023-09-18T20:39:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/highly-linear-and-efficient-mm-wave-gan-hemt-technology/</loc>
		<lastmod>2023-09-18T20:40:33+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/power-devices-based-on-silicon-carbide-how-to-manage-them-at-system-level-and-how-they-contribute-to-a-greener-world-for-all-of-us/</loc>
		<lastmod>2023-09-18T20:42:04+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/promising-results-of-national-project-by-japanese-ministry-of-the-environment/</loc>
		<lastmod>2023-09-18T20:43:41+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/areal-vertical-transmission-line-model-measurement-for-drift-region-characterization-in-vertical-gan-based-devices/</loc>
		<lastmod>2023-09-18T20:44:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/dynamic-ron-in-algan-gan-structure-with-different-layer-thickness/</loc>
		<lastmod>2023-09-18T20:46:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/a-pnp-gan-gate-algan-gan-hemt-with-improved-gate-characteristics/</loc>
		<lastmod>2023-09-18T20:47:27+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/overcoming-challenges-in-advanced-inp-hemt-manufacturing/</loc>
		<lastmod>2023-09-18T20:49:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/bihemt-idss-control-for-yield-improvement/</loc>
		<lastmod>2023-09-18T20:50:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/characterization-of-electrostatic-chuck-esc-performance-with-changes-in-wafer-warpage-and-backside-cooling-conditions/</loc>
		<lastmod>2023-09-18T20:51:18+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/ion-implantation-simulation-and-optimization-in-semiconductor-compounds/</loc>
		<lastmod>2023-09-18T20:52:25+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/roll-to-roll-manufacturing-of-epi-gan-sheets-on-metal-foil-for-leds-and-transistor-devices/</loc>
		<lastmod>2023-09-18T21:01:23+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/investigation-of-silicon-nitride-shadowed-selective-area-growth-as-an-enabling-technology-for-gan-vertical-device-processing/</loc>
		<lastmod>2023-09-18T21:02:59+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/diamond-resistives-the-passive-way-to-manage-the-heat-and-keep-the-vswr-low-at-high-frequencies/</loc>
		<lastmod>2023-09-18T21:04:12+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/delta-doping-%ce%b2-ga2o3-grown-via-plasma-assisted-molecular-beam-epitaxy-using-germanium/</loc>
		<lastmod>2023-09-18T21:05:13+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/manufacturing-challenges-of-czochralski-growth-and-fabrication-of-2-inch-semi-insulating-beta-gallium-oxide-substrates/</loc>
		<lastmod>2023-09-18T21:06:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/manufacturing-expansion-of-covid-19-foam-testing-swabs/</loc>
		<lastmod>2023-09-18T21:07:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/top-surface-edge-contact-for-wafer-level-electrical-characterization-of-2deg-in-algan-gan-on-semi-insulating-wafers/</loc>
		<lastmod>2023-09-18T21:08:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/regrown-ohmic-contact-of-inaln-gan-hemts-based-on-mocvd/</loc>
		<lastmod>2023-09-18T21:10:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/clip-bonded-ccpak-1212-engineering-the-next-generation-gan-products/</loc>
		<lastmod>2023-09-18T21:12:45+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/high-temperature-sic-power-module-with-integrated-ltcc-based-gate-driver/</loc>
		<lastmod>2023-09-18T21:13:59+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/polyimide-film-process-equipment-qualification/</loc>
		<lastmod>2023-09-18T21:16:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/reduced-metal-spits-in-e-beam-metal-evaporation-via-improved-crucible-liner-hearth-power-dissipation/</loc>
		<lastmod>2023-09-18T21:17:19+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/heater-performance-improvement-with-ceramic-coatings-for-gan-mocvd-process/</loc>
		<lastmod>2023-09-18T21:19:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/using-end-point-detection-when-wet-processing-compound-semiconductor-substrates/</loc>
		<lastmod>2023-09-18T21:20:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/warp-of-4-free-standing-gan-wafers/</loc>
		<lastmod>2023-09-18T21:21:48+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/role-of-substrate-on-the-reverse-leakage-behavior-of-the-vertical-gan-devices/</loc>
		<lastmod>2023-09-18T21:28:16+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/solution-phase-processed-zinc-oxide-vertical-schottky-diode-using-flow-limited-field-injection-electrostatic-spraying/</loc>
		<lastmod>2023-09-18T21:30:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/optimization-in-noble-metal-hard-mask-selectivity-in-chlorine-based-plasma-etch/</loc>
		<lastmod>2023-09-18T21:31:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/processing-of-vertical-gan-power-devices-via-silicon-nitride-shadowed-selective-area-growth/</loc>
		<lastmod>2023-09-18T21:33:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/prevention-of-1-2-kv-sic-mosfet-from-punch-through-phenomenon-by-self-align-channel-process/</loc>
		<lastmod>2023-09-18T21:34:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/gan-on-si-membranes-for-power-device-applications-stress-evolution-throughout-fabrication/</loc>
		<lastmod>2023-09-18T21:36:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/rounded-base-corners-in-sic-trenches-for-power-mosfets/</loc>
		<lastmod>2023-09-18T21:37:28+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/gan-wafer-level-ausn-solder-deposition-wen-zhu-kanin-chu-and-blair-coburn-bae-systems-nashua-nh-usa/</loc>
		<lastmod>2023-09-18T21:38:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/hole-injection-effect-and-dynamic-characteristics-analysis-of-normally-off-p-gan-hemt-with-algan-cap-layer-on-low-resistivity-sic-substrate/</loc>
		<lastmod>2023-09-18T21:41:27+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/improved-rf-characteristics-of-algan-aln-gan-hemt-by-using-3c-sic-si-hybrid-bond-substrate/</loc>
		<lastmod>2023-09-18T21:42:31+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/reduction-in-thermal-boundary-conductance-of-annealed-direct-wafer-bonded-gansi-heterojunction-interfaces/</loc>
		<lastmod>2023-09-18T21:44:04+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/reliability-study-of-vertical-gan-pin-rectifiers-and-the-origin-of-premature-breakdown/</loc>
		<lastmod>2023-09-18T21:51:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-high-selectivity-gan-to-algan-etching-for-hemt-devices/</loc>
		<lastmod>2023-12-13T18:16:53+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-1-1-2024-invited-semiconducting-aln-a-new-rapidly-emerging-iii-nitride-market/</loc>
		<lastmod>2024-06-19T21:24:21+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-1-2-2024-invited-a-review-of-key-developments-and-challenges-in-cvd-diamond-substrates-for-electronic-device-applications/</loc>
		<lastmod>2024-06-19T21:37:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-1-4-2024-thermal-dissipation-enhancement-using-a-metal-diamond-composite-heat-spreaders-in-high-power-rf-mmics/</loc>
		<lastmod>2024-06-19T22:22:27+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-2-1-2024-invited-chips-act-and-its-impact-on-the-compound-semiconductor-industry/</loc>
		<lastmod>2024-06-19T22:31:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-2-2-2024-invited-why-every-fab-should-be-using-ai/</loc>
		<lastmod>2024-06-19T22:34:01+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-2-4-2024-benefits-of-implementing-ai-ml-controllers-for-semiconductor-manufacturing-including-multi-tool-co-optimization/</loc>
		<lastmod>2024-06-19T22:45:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-1-3-2024-3d-diamond-growth-for-gan-cooling-and-tbr-reduction/</loc>
		<lastmod>2024-06-19T22:58:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-1-1-2024-developments-in-gaas-photolithography-processing-for-improved-hbt-base-metal-patterning-and-reduced-photoresist-popping-and-tearing/</loc>
		<lastmod>2024-06-19T23:11:11+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-1-3-2024-novel-nichrome-thin-film-resistor-fabrication-approach-in-e-beam-evaporation-for-high-volume-semiconductor-manufacturing/</loc>
		<lastmod>2024-06-19T23:28:21+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-1-4-2024-subtractive-wsin-thin-film-resistors-for-rf-gan-and-inp-mmics/</loc>
		<lastmod>2024-06-19T23:40:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-1-2-2024-optimization-of-photolithography-process-for-bihemt-gate-layer-with-high-critical-dimension-uniformity/</loc>
		<lastmod>2024-06-20T00:00:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-1-5-2024-electron-beam-deposition-with-low-spitting-platinum-source-material-improved-by-new-impurity-removal-processes/</loc>
		<lastmod>2024-06-20T00:04:20+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-2-2024-mapping-of-local-threshold-voltage-in-algan-gan-hemts/</loc>
		<lastmod>2024-06-20T19:52:00+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-3-2024-time-dependent-conduction-mechanisms-in-superlattice-layers-on-200-mm-engineered-substrates/</loc>
		<lastmod>2024-06-20T20:19:11+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-4-2024-high-throughput-wafer-characterization-for-manufacturing-needs-of-sic-and-other-wbg-technologies/</loc>
		<lastmod>2024-06-20T20:50:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-5-2024-characterization-of-1-2-kv-sic-trench-mosfets-with-buried-p-layers-using-a-double-pulse-circuit/</loc>
		<lastmod>2024-06-20T21:42:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-1-2024-gold-free-tantalum-and-titanium-based-ohmic-contacts-for-gallium-nitride-hemt-devices/</loc>
		<lastmod>2024-06-20T22:02:43+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-2-2024-enhanced-dielectric-performance-of-hfo2-thin-films-via-novel-atomic-layer-deposition-conversion-at-production-speed-and-efficiency/</loc>
		<lastmod>2024-06-20T22:13:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-4-2024-sonic-lift-off-slo-to-enable-substrate-reuse-of-bulk-gan-and-sic-substrates/</loc>
		<lastmod>2024-06-20T22:58:50+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-6-2024-improving-the-surge-characteristics-of-sic-mosfets-by-using-poly-si-sbds/</loc>
		<lastmod>2024-06-20T23:11:12+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-7-2024-lapping-and-chemical-mechanical-polishing-of-wide-and-ultra-wide-bandgap-semiconductors/</loc>
		<lastmod>2024-06-20T23:18:57+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-9-2024-characterization-of-algan-gan-hemts-on-4-inch-sic-substrate-at-cryogenic-temperature/</loc>
		<lastmod>2024-06-20T23:30:57+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-10-2024-large-scale-thin-film-128-y-cut-linbo3-on-sapphire-via-wafer-bonding/</loc>
		<lastmod>2024-06-21T00:04:24+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-11-2024-pre-warning-recognition-protective-circuit-and-failure-analysis-of-red-algainp-light-emitting-diodes-in-salty-water-vapor/</loc>
		<lastmod>2024-06-21T00:28:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-12-2024-towards-realization-of-large-scale-%ce%b2-ga2o3-composite-wafers/</loc>
		<lastmod>2024-06-21T00:36:24+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-14-2024-pyramidal-%ef%81%adleds-a-novel-bottom-up-concept-for-small-bright-and-efficient-light-emitters-for-ar-based-%ef%81%adled-projectors-and-displays/</loc>
		<lastmod>2024-06-21T00:49:44+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-13-2024-plug-n-play-secs-gem-for-legacy-equipment/</loc>
		<lastmod>2024-06-21T00:51:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10-2-3-2024-leveraging-smart-factory-principles-for-chemical-usage-and-cost-reductions/</loc>
		<lastmod>2024-06-21T20:54:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11-2-1-2024-defect-reduction-and-yield-improvement-of-mim-capacitors/</loc>
		<lastmod>2024-06-21T21:11:21+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-3-2024-3d-visualization-and-characterization-of-sic-mosfet-junctions-using-ebic-and-fib-sem-tomography/</loc>
		<lastmod>2024-06-21T21:36:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-5-2024-junction-termination-extensions-using-p-type-epitaxial-growth-layers-for-3-3-kv-sic-pin-diodes/</loc>
		<lastmod>2024-06-21T21:40:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-0-15-2024-deterioration-of-zno-nanorod-photodetectors-in-saline-vapor/</loc>
		<lastmod>2024-06-21T22:01:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/bilayer-n-metal-lift-off-process-on-thick-dbrs-mesa-for-low-threshold-vcsels/</loc>
		<lastmod>2025-01-20T20:51:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/1-2-final-2025/</loc>
		<lastmod>2025-05-28T18:22:44+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/1-1-final-2025/</loc>
		<lastmod>2025-05-28T18:24:51+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2b-2-impurity-induced-disordering-of-ingaas-inalas-superlattices-by-zinc-diffusion-for-electrical-confinement-in-quantum-cascade-lasers/</loc>
		<lastmod>2025-05-28T18:37:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10a-1-gan-micro-leds-for-chip-to-chip-interconnects/</loc>
		<lastmod>2025-05-28T21:02:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/practical-n-type-doping-in-aln-for-power-electronics/</loc>
		<lastmod>2025-06-01T23:52:54+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2a-2-vertical-gan-trench-mosfets-with-hfo2-al2o3-layered-gate-dielectric/</loc>
		<lastmod>2025-06-02T00:14:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/1700-v-breakdown-monolithic-bidirectional-gan-algan-mishemts-with-a-thin-buffer-grown-on-sic-substrate/</loc>
		<lastmod>2025-06-02T18:48:58+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2a-4-the-effect-of-operating-temperature-on-the-on-state-performance-of-quasi-vertical-gallium-nitride-mosfets/</loc>
		<lastmod>2025-06-02T18:51:31+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2b-1-highly-manufacturable-epitaxial-transfer-process-for-novel-ingan-laser-diodes/</loc>
		<lastmod>2025-06-02T18:53:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2b-3-the-oxide-layers-effects-on-gaas-based-multi-junction-vertical-cavity-surface-emitting-lasers/</loc>
		<lastmod>2025-06-02T19:43:25+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2b-4-monolithic-dual-wavelength-dfb-laser-with-over-140-mw-optical-power-and-frequency-noise-floor-below-2-15-x-10%e2%81%b4-hz%c2%b2-hz-for-high-precision-thz-systems/</loc>
		<lastmod>2025-06-02T19:59:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3a-1-wide-bandgap-power-switches-gan-hemt-and-sic-power-mosfets-for-hard-and-soft-switching-applications-a-long-term-perspective/</loc>
		<lastmod>2025-06-02T20:03:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3a-2-normally-off-n-polar-gan-aln-transistors-with-p-nio-gate-stacks/</loc>
		<lastmod>2025-06-02T20:17:31+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3a-3-vertical-gan-on-tungsten-high-voltage-pn-diodes/</loc>
		<lastmod>2025-06-02T20:34:08+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3a-4-high-voltage-design-strategies-for-gallium-oxide-power-devices/</loc>
		<lastmod>2025-06-02T21:01:41+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3a-5-1000-hour-htrb-test-on-1200-v-lateral-hemts-with-engineered-p-gan-gate/</loc>
		<lastmod>2025-06-02T21:14:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3b-1-the-next-global-gan-patent-wars/</loc>
		<lastmod>2025-06-02T21:21:22+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3b-2-a-fabrication-process-for-airbox-encapsulation-of-t-gates/</loc>
		<lastmod>2025-06-02T21:34:27+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3b-3-metal-additive-micro-manufacturing-to-achieve-enhanced-air-bridge-geometry-for-coplanar-waveguide-mm-wave-gan-on-sic-integrated-circuits/</loc>
		<lastmod>2025-06-02T21:47:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3b-4-a-new-approach-to-gold-electron-beam-evaporation-with-improved-process-quality-and-throughput/</loc>
		<lastmod>2025-06-02T21:54:38+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3b-5-stability-of-3-3-kv-planar-gan-diodes-with-nitrogen-implanted-termination-under-high-temperature-reverse-bias-stressing/</loc>
		<lastmod>2025-06-02T22:08:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4a-1-x-band-inalgan-gan-hemt-with-high-power-and-high-reliability/</loc>
		<lastmod>2025-06-02T22:25:33+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4a-2-temperature-effects-on-dc-and-rf-characteristics-of-140-nm-algan-gan-hemts-with-regrown-contacts/</loc>
		<lastmod>2025-06-02T22:38:50+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4a-3-dual-gate-rf-hemt-based-on-p-gan-algan-on-si-technology-for-future-x-band-on-chip-rf-and-power-electronics/</loc>
		<lastmod>2025-06-02T23:04:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4a-4-high-power-added-efficiency-enhancement-mode-%ef%81%87-gate-rf-hemt-with-engineered-mg-doping-profile-in-p-gan-layer/</loc>
		<lastmod>2025-06-02T23:37:23+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4b-1-advances-in-to-packaging-for-high-power-gan-device-performance-and-reliability/</loc>
		<lastmod>2025-06-03T16:51:43+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4b-4-double-side-diamond-cooling-of-gan-hemts-and-progress-towards-further-reductions-in-junction-to-package-thermal-resistance/</loc>
		<lastmod>2025-06-03T17:34:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4b-2-cu-bumps-with-ni-barrier-and-on-wafer-reflow-for-improved-reliability-manufacturability/</loc>
		<lastmod>2025-06-03T17:37:35+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4b-3-heat-resistance-improvement-of-palladium-pre-plated-frames-of-semiconductor-packaging-with-a-new-additive-for-nickel-plating/</loc>
		<lastmod>2025-06-03T17:39:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-1-the-defense-advanced-research-agencys-darpa-next-generation-microelectronics-manufacturing-ngmm-program/</loc>
		<lastmod>2025-06-03T17:46:38+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-2-cmos-compatible-compound-semiconductors-at-imec/</loc>
		<lastmod>2025-06-03T17:47:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6a-1-packaging-of-compound-semiconductors-current-status-and-future-challenges/</loc>
		<lastmod>2025-06-03T18:24:10+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6a-2-heterogeneous-integration-of-large-area-ingaas-swir-photodetectors-on-300-mm-cmos-compatible-si-substrates/</loc>
		<lastmod>2025-06-03T18:26:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6a-3-heterogeneous-aip-sip-for-satcom/</loc>
		<lastmod>2025-06-03T18:27:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6a-4-quantifying-thermal-benefits-of-metal-embedded-chip-assembly-as-a-heterogeneous-integration-approach/</loc>
		<lastmod>2025-06-03T18:29:43+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6b-3-pyramidal-microleds-delivering-rgb-in-the-same-materials-system/</loc>
		<lastmod>2025-06-03T19:55:32+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6b-4-advanced-process-development-for-microcavity-vcsels/</loc>
		<lastmod>2025-06-03T19:57:59+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7a-1-first-demonstration-of-inp-hbts-on-inp-on-si-inposi-substrate-a-cost-effective-and-sustainable-iii-v-on-si-technology-for-advanced-rf-applications/</loc>
		<lastmod>2025-06-03T20:14:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6b-2-design-of-novel-long-wavelength-vcsel-structure-with-voltage-controllable-phase-matching-layer-for-standing-wave-tuning/</loc>
		<lastmod>2025-06-04T16:49:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8a-1-current-status-of-bulk-%ef%81%a2-ga2o3-and-%ef%81%a2-alxga1-x2o3-crystal-growth/</loc>
		<lastmod>2025-06-04T17:50:08+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8a-2-kv-class-%ce%b2-ga2o3-trench-schottky-barrier-diodes-double-drift-layer-design-and-breakdown-analysis/</loc>
		<lastmod>2025-06-04T17:59:00+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8a-3-vertical-schottky-barrier-diodes-with-optical-floating-zone-growth-of-%ce%b2-ga2o3-single-crystals-and-electrical-defect-study/</loc>
		<lastmod>2025-06-04T18:02:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8a-4-gallium-oxide-trench-schottky-barrier-diodes-with-field-plate-edge-termination/</loc>
		<lastmod>2025-06-04T18:04:27+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7a-2-development-of-6-inch-indium-phosphide-substrates/</loc>
		<lastmod>2025-06-04T18:17:21+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7a-3-heteroepitaxial-growth-of-%ce%b1-ga2o3-by-mocvd-on-a-m-r-and-c-plane-sapphire/</loc>
		<lastmod>2025-06-04T18:18:56+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7a-4-smartsic-150-200mm-engineered-substrate-solving-sic-power-devices-bipolar-degradation/</loc>
		<lastmod>2025-06-04T18:21:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7a-5-crack-free-aln-thin-films-on-si-substrates-for-large-area-ultrawide-bandgap-semiconductor-template/</loc>
		<lastmod>2025-06-04T18:27:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6b-1-micro-led-maturation-from-beachhead-in-ar-to-tam-of-entire-display-market/</loc>
		<lastmod>2025-06-04T18:30:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8b-5-compounding-success-leveraging-semiconductor-collaboration-and-innovation-to-advance-the-technologies-of-tomorrow/</loc>
		<lastmod>2025-06-04T18:46:32+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/9-1-drive-green-manufacturing-to-shape-a-sustainable-future-for-the-semiconductor-industry/</loc>
		<lastmod>2025-06-04T18:57:24+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10a-2-technological-advancements-in-algan-based-deep-ultraviolet-laser-diodes/</loc>
		<lastmod>2025-06-04T19:17:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10a-3-efficient-front-end-manufacturing-of-high-quality-vcsel-enabled-by-in-situ-and-ex-situ-optical-metrology-during-epi-growth-and-processing/</loc>
		<lastmod>2025-06-04T19:19:41+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10a-4-single-mode-polarization-stable-2d-vcsel-arrays-via-elliptical-disorder-defined-apertures/</loc>
		<lastmod>2025-06-04T19:22:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10b-1-mapping-defects-in-sic-wafers-using-a-multi-channel-convolutional-neural-network/</loc>
		<lastmod>2025-06-04T20:57:13+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10b-2-macro-and-micro-scale-non-contact-imaging-of-electrically-active-extended-defects-in-merged-pin-schottky-diode-devices/</loc>
		<lastmod>2025-06-04T21:05:19+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10b-3-determination-of-4h-sic-drift-layer-quality-with-mercury-hg-probe-capacitance-voltage-cv-and-current-voltage-iv-measurements/</loc>
		<lastmod>2025-06-04T21:09:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10b-4-characterizing-capacitor-top-plate-bias-for-more-accurate-electromagnetic-simulations/</loc>
		<lastmod>2025-06-04T21:10:28+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/10b-5-end-to-end-yield-management-for-compound-semiconductors-manufacturing/</loc>
		<lastmod>2025-06-04T21:12:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11a-1-a-hybrid-electron-beam-lithography-approach-to-wafer-scale-up-of-150mm-inp-ridge-lasers/</loc>
		<lastmod>2025-06-04T21:53:59+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11a-2-recent-trends-in-the-manufacturing-of-inp-photonic-integrated-circuits-p/</loc>
		<lastmod>2025-06-04T21:59:58+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11a-3-high-volume-quantum-dot-epitaxial-wafer-manufacturing-to-meet-demands-of-ai-driven-data-centers/</loc>
		<lastmod>2025-06-04T22:01:15+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11a-4-vertically-integrated-development-of-algan-based-uv-detectors/</loc>
		<lastmod>2025-06-04T22:03:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11b-1-use-of-e-beam-lithography-to-optimize-lithography-patterning-on-sic-wafers/</loc>
		<lastmod>2025-06-04T22:42:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11b-2-optimized-resistor-layer-photolithography-scheme-with-dose-compensation-for-high-resistance-uniformity-of-reactively-sputtered-tan-thin-film/</loc>
		<lastmod>2025-06-04T22:44:30+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11b-3-evaluation-and-modeling-of-low-value-comb-resistors/</loc>
		<lastmod>2025-06-04T22:45:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11b-4-towards-determining-the-optimal-ion-implantation-temperature-beam-current-annealing-temperature-time-in-sic-device-manufacturing/</loc>
		<lastmod>2025-06-04T22:47:28+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11b-5-emitter-ledge-effect-on-current-gain-of-sub-micron-type-ii-inp-dhbt/</loc>
		<lastmod>2025-06-04T22:50:34+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-1-impact-of-p-doping-on-properties-of-zncdte-thin-films-grown-by-molecular-beam-epitaxy-on-gaas100-substrates-for-photovoltaic-applications/</loc>
		<lastmod>2025-06-05T00:09:04+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-2-crystallographic-dependency-of-%ce%b2-ga2o3-nitridation-via-rf-nitrogen-plasma-for-gan-heteroepitaxy/</loc>
		<lastmod>2025-06-05T00:13:05+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-3-silicon-nitride-shadowed-selective-area-growth-as-a-device-processing-method-for-heteroepitaxy-of-gan-on-%ce%b2-ga2o3/</loc>
		<lastmod>2025-06-05T00:14:36+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-4-epd-is-more-than-a-number-tackling-dislocation-density-assessment-in-low-defect-large-diameter-gaas-and-inp-wafer/</loc>
		<lastmod>2025-06-05T00:17:05+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-5-low-ohmic-contact-resistances-for-rf-gan-hemts-with-al0-36ga0-64n-barrier/</loc>
		<lastmod>2025-06-05T00:18:32+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-6-off-axis-sputtering-fabrication-of-ito-contact-layers-for-pgan/</loc>
		<lastmod>2025-06-05T01:12:34+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-7-regrowth-free-1st-order-gratings-for-photonic-integrated-circuits-using-focused-ion-beam-nanofabrication-and-electron-beam-lithography/</loc>
		<lastmod>2025-06-05T01:18:18+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-8-reducing-fluorocarbon-usage-in-resistor-layer-sinx-etch/</loc>
		<lastmod>2025-06-05T01:19:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-9-low-damage-chlorine-based-dry-etch-for-fabrication-of-ga2o3-finfets-and-trench-diodes/</loc>
		<lastmod>2025-06-05T01:24:54+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/11113/</loc>
		<lastmod>2025-06-05T18:05:19+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8b-1-8b-3-midwest-microelectronics-consortium-mmec-hub/</loc>
		<lastmod>2025-06-05T20:38:32+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7b-2-overview-of-u-s-dod-microelectronics-commons/</loc>
		<lastmod>2025-06-05T20:54:37+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-10-improvements-in-photoresist-strip-process-in-rf-power-transistors/</loc>
		<lastmod>2025-06-05T22:07:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-11-reconfiguration-of-cmp-tools-for-beol-processing-of-compound-semiconductor-iii-v-microsystems-devices/</loc>
		<lastmod>2025-06-05T22:15:08+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-12-enabling-high-aspect-ratio-interconnects-for-advanced-packaging-of-mems-and-sensors/</loc>
		<lastmod>2025-06-05T22:19:48+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-13-gan-epitaxy-dislocation-identification-by-molten-koh-etching/</loc>
		<lastmod>2025-06-05T22:31:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-14-root-cause-analysis-and-reduction-of-crater-defect-formation-for-gaas-wafers-during-backside-processing/</loc>
		<lastmod>2025-06-05T22:43:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-15-improving-wafer-breakage-through-peak-cooling-rate-reduction-on-lithium-niobate-substrates/</loc>
		<lastmod>2025-06-05T22:44:49+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-16-electron-beam-deposition-with-low-spitting-silver-source-material-improved-by-new-impurity-removal-processes/</loc>
		<lastmod>2025-06-05T22:46:25+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-18-0-25%ce%bcm-gan-on-silicon-hemt-technology-for-rf-application/</loc>
		<lastmod>2025-06-05T23:04:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-19-kv-class-vertical-p-n-heterojunction-rectifier-based-on-ito-diamond/</loc>
		<lastmod>2025-06-05T23:21:57+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/1-0-1-2024-bridging-realities-compound-semiconductor-solutions-for-next-generation-augmented-reality-displays/</loc>
		<lastmod>2025-06-09T19:27:13+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/photonic-integrated-circuits-pics-from-inp-to-gan-based-solutions/</loc>
		<lastmod>2025-06-09T19:44:43+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-1-2-2024-experimentally-validated-innovative-edge-termination-for-vertical-gan-diodes/</loc>
		<lastmod>2025-06-09T19:52:22+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-1-2-2024-expanding-the-scope-of-gan-power-integration/</loc>
		<lastmod>2025-06-09T20:07:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-1-4-2024-overlapping-source-field-plate-process-module-for-high-voltage-gan-hfets-with-low-off-state-leakage-currents/</loc>
		<lastmod>2025-06-09T20:21:22+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-2-1-2024-high-power-nitrogen-polar-gan-inaln-hemt-with-record-power-density-of-12-8-w-mm-at-28-ghz/</loc>
		<lastmod>2025-06-10T17:18:31+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-1-1-2024-electrochemical-mechanical-polishing-of-sic-wafer-using-solid-polymer-electrolyte/</loc>
		<lastmod>2025-06-10T17:51:34+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-1-2-2024-electrochemical-additive-selection-for-non-cyanide-gold-plating-bath-for-uniform-thickness-gold-layer-for-gaas-backside-metallization/</loc>
		<lastmod>2025-06-10T17:53:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-1-3-2024-optimization-of-alscn-etch-processes-ensuring-minimum-bottom-electrode-loss/</loc>
		<lastmod>2025-06-10T17:59:09+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-1-4-2024-plasma-dicing-for-high-yield-sic-singulation/</loc>
		<lastmod>2025-06-10T18:00:36+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-1-1-2024-key-challenges-in-process-development-for-future-high-voltage-gan-roadmap/</loc>
		<lastmod>2025-06-10T18:29:05+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-2-2-2024-x-band-gan-hemt-and-free-standing-gan-substrate-for-marine-radar/</loc>
		<lastmod>2025-06-10T18:33:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-2-3-2024-depleted-aln-si-interfaces-for-minimizing-rf-loss-in-gan-on-si-hemts/</loc>
		<lastmod>2025-06-10T18:35:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/2-2-4-2024-the-50v-gan-hemt-with-memory-effect-suppression/</loc>
		<lastmod>2025-06-10T18:36:14+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-2-1-2024-ultra-thin-indium-oxide-thin-film-transistors-with-gigahertz-operation-frequency/</loc>
		<lastmod>2025-06-10T18:40:04+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-2-2-2024-improved-thermal-reliability-in-base-contact-of-full-3-inch-inp-double-hbts-with-ft-and-fmax-in-excess-of-300-ghz/</loc>
		<lastmod>2025-06-10T18:41:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-2-3-2024-5-level-stacked-in0-53ga0-47as-multi-bridged-channel-field-effect-transistors/</loc>
		<lastmod>2025-06-10T18:42:50+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/3-2-4-2024-70-nm-gaas-phemt-for-d-band-power-amplifier-application/</loc>
		<lastmod>2025-06-10T18:43:40+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-1-1-2024-invited-electrostatic-engineering-for-high-performance-gallium-oxide-devices/</loc>
		<lastmod>2025-06-10T18:45:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-1-2-2024-progress-in-diamond-mosfet-technologies/</loc>
		<lastmod>2025-06-10T18:46:41+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-1-3-2024-influence-of-carbon-capping-materials-during-high-temperature-annealing-on-surface-defects-and-dopant-profile-in-sic/</loc>
		<lastmod>2025-06-10T18:47:34+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-1-4-2024-wafer-bow-tuning-with-stealth-laser-patterning-for-vertical-high-voltage-devices-with-thick-gan-epitaxy-on-sapphire-substrates/</loc>
		<lastmod>2025-06-10T18:48:25+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-2-1-2024-silicon-meets-compound-semiconductors-pioneering-wireless-communications/</loc>
		<lastmod>2025-06-10T18:50:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-2-2-2024-heterogeneously-integrated-compound-semiconductors-on-large-diameter-substrates-for-scaling-to-consumer-market-volumes/</loc>
		<lastmod>2025-06-10T18:51:24+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-2-3-2024-a-monolithic-iii-v-on-si-integration-technology-utilizing-300mm-cmos-platform/</loc>
		<lastmod>2025-06-10T18:52:26+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/4-2-4-2024-200-mm-enhancement-mode-low-knee-voltage-gan-on-si-misfets-for-highfrequency-handset-applications/</loc>
		<lastmod>2025-06-10T18:53:37+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-0-1-2024-gan-power-the-solution-that-is-not-sic/</loc>
		<lastmod>2025-06-10T18:55:53+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-0-2-2024-sic-power-devices-as-key-enabling-components-for-the-green-energy-transition-how-the-growth-journey-began-and-will-go-on/</loc>
		<lastmod>2025-06-10T18:57:18+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/5-0-3-2024-large-scale-commercializa%c9%b5on-of-silicon-carbide-for-ev/</loc>
		<lastmod>2025-06-10T18:58:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-1-1-2024-invitedtaking-gan-to-the-next-level-of-100-v-to-2000-v-and-beyond-scalability-with-the-revolutionary-200-mm-and-300-mm-qst-manufacturing-platform/</loc>
		<lastmod>2025-06-10T19:01:02+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-2-1-2024-gan-power-ics-bring-highest-levels-of-sustainability-through-manufacturing-processes-and-end-equipment-applications/</loc>
		<lastmod>2025-06-10T19:02:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-1-3-2024-smartsic-150-200mm-engineered-substrate-increasing-sic-power-device-current-density-up-to-30/</loc>
		<lastmod>2025-06-10T19:03:29+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-1-4-2024-thermally-stable-normally-off-1200-v-cascoded-algan-gan-hemt-using-bufferfree-structure-on-6-sic-substrate/</loc>
		<lastmod>2025-06-10T19:04:42+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-2-1-2024-will-microled-succeed-in-high-volume-consumer-applications/</loc>
		<lastmod>2025-06-10T19:11:01+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-2-2-2024-invited-micro-led-technology-and-platform-trend/</loc>
		<lastmod>2025-06-10T19:12:53+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-2-3-2024-plasma-etch-end-pointing-in-inp-based-laser-device-structures/</loc>
		<lastmod>2025-06-10T19:13:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/6-2-4-2024/</loc>
		<lastmod>2025-06-10T19:14:46+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-1-1-2024-tbd/</loc>
		<lastmod>2025-06-10T19:17:10+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-1-2-2024-the-accelerating-future-of-heterogeneous-integration/</loc>
		<lastmod>2025-06-10T19:18:07+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-1-3-2024-invited-recovery-of-constituent-elements-and-crystal-growth-of-compound-semiconductors-using-marine-bacteria-2/</loc>
		<lastmod>2025-06-10T19:19:05+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-22-1-2024-invited-mass-transfer-of-efficient/</loc>
		<lastmod>2025-06-10T19:22:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-2-2-2024-invited-micro-led-maturation-from-beachhead-in-ar-vr-to-tam-of-entire-display-market/</loc>
		<lastmod>2025-06-10T19:23:58+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-2-3-2024-1-6-%ce%bcm-lasing-and-mid-wave-infrared-detection-in-inp-based-transistor-injected-quantum-cascade-structures/</loc>
		<lastmod>2025-06-10T19:24:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/7-2-4-2024-edge-termination-engineering-with-shallow-bevel-mesas-for-low-leakage-vertical-gan-based-p-i-n-avalanche-photodiode/</loc>
		<lastmod>2025-06-10T19:25:55+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-1-2-2024-invited-rf-packaging-challenges-for-high-efficiency-space-compliant-rf-power-amplifier/</loc>
		<lastmod>2025-06-10T19:28:08+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-1-2-2024-design-fabrication-and-characterization-of-gan-based-single-drift-region-impatt-diodes/</loc>
		<lastmod>2025-06-10T19:29:03+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-1-3-2024-high-temperature-operation-of-gan-high-electron-mobility-transistors-on-large-area-engineered-substrates-for-extreme-environments/</loc>
		<lastmod>2025-06-10T19:30:06+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-1-4-2024-i-line-lithography-technology-for-0-25-%c2%b5m-gan-hemts-for-future-base-station/</loc>
		<lastmod>2025-06-10T19:31:00+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-2-1-2024-invited-in-situ-epitaxial-growth-control-of-gan-based-vertical-cavity-surface-emitting-lasers/</loc>
		<lastmod>2025-06-10T19:43:20+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-2-2-2024-quicksels-enabling-rapid-feedback-to-epitaxy/</loc>
		<lastmod>2025-06-10T19:44:17+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-2-3-2024-polarization-control-in-vertical-cavity-surface-emitting-lasers-via-elliptical-aperture-definition-in-optical-coatings/</loc>
		<lastmod>2025-06-10T19:45:47+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/8-2-4-2024-thermal-stability-enhancement-of-p-metals-ohmic-contact-in-oxide-vcsels/</loc>
		<lastmod>2025-06-10T19:46:52+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/9-0-1-2024-chips-for-america-a-historic-investment-in-semiconductor-technology/</loc>
		<lastmod>2025-06-10T19:49:39+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/9-0-2-2024-the-essential-role-of-compound-semiconductors-in-6g-wireless/</loc>
		<lastmod>2025-06-10T19:50:48+00:00</lastmod>
	</url>
	<url>
		<loc>https://csmantech.org/paper/12-17-development-of-cap-layers-for-high-temperature-pulse-annealing-of-gan/</loc>
		<lastmod>2025-09-08T17:39:04+00:00</lastmod>
	</url>
</urlset>
<!-- XML Sitemap generated by Yoast SEO -->