May 10, 2022 // 4:50pm

4.3 Transfer of the AFRL 0.14 μm AlGaN/GaN-on-SiC MMIC Process to MACOM’s Commercial Fab

G. Cueva, MACOM
E. Werner, KBR, Wright-Patterson AFB
A. Islam, Air Force Research Laboratory
N. Miller, Air Force Research Laboratory
A. Crespo, Air Force Research Laboratory
N. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
D. Walker Jr., Air Force Research Laboratory
Gary Hughes, Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH
R. Fitch, Air Force Research Laboratory
K. Chabak, Air Force Research Laboratory
Andrew Green, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
Kyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA

Abstract

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