18.6 Chemical Mechanical Polishing of β-Ga2O3

May 12, 2022 // 3:20pm

M.S. Goorsky, University of California, Los Angeles, CA USA

M. E. Liao, University of California, Los Angeles, CA USA

K. Huynh, University of California, Los Angeles, CA USA

W. Olsen, University of California, Los Angeles, CA USA

X. Huang, Argonne National Laboratory

M. Wojcik, Argonne National Laboratory

J. C. Gallagher, Naval Research Laboratory

T. J. Anderson, Naval Research Laboratory

Y. Wang, University of California, Los Angeles, CA USA

Student Presentation

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