May 12, 2022 // 2:30pm

16.4 Delta Doping β-Ga2O3 Grown Via Plasma Assisted Molecular Beam Epitaxy Using Germanium

Thaddeus Asel, Air Force Research Laboratory, Wright Patterson AFB, OH, USA
Shin Mou, Air Force Research Laboratory, Wright Patterson AFB, OH
Erich Steinbrunner, Air Force Research Laboratory, Wright Patterson AFB, OH, USA and Wright State University, Dayton, OH
Jessica Hendricks, AFRL, Air Force Institute of Technology, Wright State University, Dayton, OH and Southwestern Ohio Council for Higher Education
Adam T. Neal, Air Force Research Laboratory, Wright Patterson AFB, OH
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