Development and Control of a 0.25μm Gate Process Module for AlGaN/GaN HEMT Production

Wei-Chou Wang, WIN Semiconductors Corp
Chia-Hao Chen, WIN Semiconductors Corp
Jhih-Han Du, WIN Semiconductors Corp
Ming-Hung Weng, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Che-Kai Lin, WIN Semiconductors Corp
Willie Huang
Ricky Chang, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Shih-Hui Huang, WIN Semiconductors Corp
Yi-Feng Wei, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Stanley Hsieh, I-Te Cho, Walter Wohlmuth WIN Semiconductors Corp.
Michael Casbon
Paul J. Tasker
Wen-Kai Wang, WIN Semiconductors Corp.
I-Te Cho, WIN Semiconductors Corp.
Download Paper