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Set up and Characterization of an Optical Wide Stepper Process For DR15 Technology as a replacement for E-Beam Lithography
Amy Zhou, TriQuint Semiconductor, TX
Jerry Beene, TriQuint Semiconductor,TX
Marcus King, TriQuint Semiconductor, TX
Ming-Yih Kao, Qorvo, Inc.
Hua-Tang Chen, Qorvo, Inc.
Chris Puckett, TriQuint Semiconductor
