The Effect of Exposure Mode on Feature Resolution and Film Thickness for Thick (>10 µm) BCB - CS MANTECH Conference CS MANTECH Conference

The Effect of Exposure Mode on Feature Resolution and Film Thickness for Thick (>10 µm) BCB

J. Parke, Northrop Grumman (MS), Linthicum, MD

A. Gupta

J. Mason, Northrop Grumman (MS), Linthicum, MD

K. Renaldo, Northrop Grumman (MS), Linthicum, MD

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