The Effect of Exposure Mode on Feature Resolution and Film Thickness for Thick (>10 µm) BCB

J. Parke, Northrop Grumman (MS), Linthicum, MD
A. Gupta
J. Mason, Northrop Grumman (MS), Linthicum, MD
K. Renaldo, Northrop Grumman (MS), Linthicum, MD
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