Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Sponsors
Authors
Exhibits
Digests
Contact
40th Anniversary (2026)
Best Poster-Awards
Best Paper History
Conference Chair History
Grab Your CSMANTECH Swag
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Sponsors
Authors
Exhibits
Digests
Contact
40th Anniversary (2026)
Best Poster-Awards
Best Paper History
Conference Chair History
12.3 The Demonstration and Characterization of In-situ SiNx/AlGaN/GaN HEMT on 6-inch Silicon on Insulator (SOI) Substrate
Hao-Yu Wang, Institute of Semiconductors, Chinese Academy of Sciences; University of Chinese Academy of Sciences
Li-Yi Peng, Chang Gung University
Hsiang-Chun Wang, Chang Gung University
Yuan-Hsiang Cheng
Download Paper