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2024 Advance Program
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12.3 The Demonstration and Characterization of In-situ SiNx/AlGaN/GaN HEMT on 6-inch Silicon on Insulator (SOI) Substrate
Hao-Yu Wang, Institute of Semiconductors, Chinese Academy of Sciences; University of Chinese Academy of Sciences
Li-Yi Peng, Chang Gung University
Hsiang-Chun Wang, Chang Gung University
Yuan-Hsiang Cheng
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