3.4.2023 Advanced Carbon film for high-voltage power, high-performance SiC devices

Ludovico Megalini, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Yi Zheng, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Ricky Fang, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Pratim Palit,, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Jinghe Yang, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Qintao Zhang, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Jang Seok Oh, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Bryan Turner, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Samphy Hong, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Jiao Yang, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Joseph Lee, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Gopal Prabhu, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Aswin Prathap Pitchiya, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
David A. Britz, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Raghav Sreenivasan, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Stephen Krause, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA: Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Michael Chudzik, Applied Materials, 3325 Scott Bldv., Santa Clara, CA (95054), USA Applied Materials, 35 Dory Road, Gloucester, MA (01930), USA
Tamara Fidler, Centrotherm international AG, Württemberger Str. 31, 89143 Blaubeuren, Germany
Patrick Schmid, Centrotherm international AG, Württemberger Str. 31, 89143 Blaubeuren, Germany
Bas Derksema, Centrotherm international AG, Württemberger Str. 31, 89143 Blaubeuren, Germany

3.4.203_CS_MANTECH_2023_Megalini_final