5.1 Thermal Analysis of GaN-HEMT/SiC on Diamond by Surface Activated Bonding

Naoya Okamoto, Fujitsu Limited and Fujitsu Laboratories Ltd.
Yuichi Minoura, Fujitsu Limited and Fujitsu Laboratories Ltd.
Motonobu Sato, Fujitsu Laboratories Ltd.
Toshihiro Ohki, Fujitsu Limited and Fujitsu Laboratories Ltd.
Shiro Ozaki, Fujitsu Limited and Fujitsu Laboratories Ltd.
Kozo Makiyama, Fujitsu Limited and Fujitsu Laboratories Ltd.
Atsushi Yamada, Fujitsu Limited and Fujitsu Laboratories Ltd.
Junji Kotani, Fujitsu Limited and Fujitsu Laboratories Ltd.
Kazukiyo Joshin, Fujitsu Laboratories Ltd.
Norikazu Nakamura, Fujitsu Limited and Fujitsu Laboratories Ltd.
Download Paper