6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures

Jean Decobert, III-V Lab
N. Vaissiere, III-V Lab
D. Micha, III-V Lab
D. Néel, III-V Lab
M. Binetti, LayTec AG
A. Adrian, LayTec AG
C. Lörchner-Gerdaus, LayTec AG
D. Cornwell, LayTec AG
N. Rezaei-Hartmann, LayTec AG
T. Brand, LayTec AG
A. Martinez, LayTec AG
K. Haberland, LayTec AG
J.-T Zettler, LayTec AG

6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures