6.2.3.2024 Plasma-Etch End-Pointing in InP-Based Laser Device Structures

Jean Decobert, III-V Lab

N. Vaissiere, III-V Lab

D. Micha, III-V Lab

D. Néel, III-V Lab

M. Binetti, LayTec AG

A. Adrian, LayTec AG

C. Lörchner-Gerdaus, LayTec AG

D. Cornwell, LayTec AG

N. Rezaei-Hartmann, LayTec AG

T. Brand, LayTec AG

A. Martinez, LayTec AG

K. Haberland, LayTec AG

J.-T Zettler, LayTec AG

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