9.2 Performance Limiting Leakage Current Across Ar-Implantation Isolation in AlGaN/GaN Structures for High Power Applications

Janina Moereke
Erwan Morvan, CEA, Leti
William Vandendaele, CEA, Leti
Fabienne Allain, CEA, Leti
Alphonse Torres, CEA, Leti
Matthew Charles, CEA, Leti
Marc Plissonnier, CEA, Leti
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