9.4 Extending MTBC to High Productive Performance Levels in ICP SiN Etching for Advanced RF Applications

Elena B Woodard, Skyworks Solutions, Inc., Newbury Park, CA
Daniel K Berkoh, Skyworks Solutions, Inc., Newbury Park, CA
Stephen Vargo, SPTS Technologies, Inc.
Miki Takagi, SPTS Technologies, Inc.
Michael Blair, SPTS Technologies, Inc.
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