9.4 Extending MTBC to High Productive Performance Levels in ICP SiN Etching for Advanced RF Applications

Elena B. Woodard, Skyworks Solutions, Inc., Newbury Park, CA
Daniel Berkoh, Skyworks Solutions, Inc., Newbury Park, CA
Stephen Vargo, SPTS Technologies, Inc.
Miki Takagi, SPTS Technologies, Inc.
Michael Blair, SPTS Technologies, Inc.
Download Paper