Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
9.4 Extending MTBC to High Productive Performance Levels in ICP SiN Etching for Advanced RF Applications
Elena B Woodard, Skyworks Solutions, Inc., Newbury Park, CA
Daniel K Berkoh, Skyworks Solutions, Inc., Newbury Park, CA
Stephen Vargo, SPTS Technologies, Inc.
Miki Takagi, SPTS Technologies, Inc.
Michael Blair, SPTS Technologies, Inc.
Download Paper