Development of an InP/GaAsSb DHBT MMIC Process with a Teflon AF Interlevel Dielectric

Ralf Flückiger, Millimeter-Wave Electronics Group, ETH-Zürich
Rickard Lövblom, Millimeter-Wave Electronics Group, ETH-Zürich
Maria Alexandrova, ETH-Zurich
Hansruedi Benedickter, Millimeter-Wave Electronics Group, ETH-Zürich
Olivier Ostinelli, ETH-Zurich
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