Homogeneity control of powerelectronic device structures by advanced in-situ metrology

Oliver Schulz, Institut for Experimentelle Physik
Armin Dadgar, Institut for Experimentelle Physik
Jonas Hennig, Institut for Experimentelle Physik
Oliver Krumm, Institut for Experimentelle Physik
Stephanie Fritze, Institut for Experimentelle Physik
Jürgen Bläsing, Institut for Experimentelle Physik
Hartmut Witte, Institut for Experimentelle Physik
Annette Diez, Institut for Experimentelle Physik
Alois Krost, Institut for Experimentelle Physik
LayTec AG, Institut for Experimentelle Physik
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