The Effects of SF6Plasma and in-situ N2Plasma Treatment on Gate Leakage, Subthreshold Slope, and Current Collapse in AlGaN/GaN HEMTs - CS MANTECH Conference CS MANTECH Conference

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The Effects of SF6Plasma and in-situ N2Plasma Treatment on Gate Leakage, Subthreshold Slope, and Current Collapse in AlGaN/GaN HEMTs

Neung-Hee Lee, Seoul National University

Woojin Choi, Seoul National University

Minseong Lee, Seoul National University

Seonhong Choi, Seoul National University

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