Alois Krost
Institut for Experimentelle Physik
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Homogeneity control of powerelectronic device structures by advanced in-situ metrology
Oliver Schulz, Institut for Experimentelle PhysikArmin Dadgar, Institut for Experimentelle PhysikJonas Hennig, Institut for Experimentelle PhysikOliver Krumm, Institut for Experimentelle PhysikStephanie Fritze, Institut for Experimentelle PhysikJürgen Bläsing, Institut for Experimentelle PhysikHartmut Witte, Institut for Experimentelle PhysikAnnette Diez, Institut for Experimentelle PhysikAlois Krost, Institut for Experimentelle PhysikLayTec AG, Institut for Experimentelle Physik