Chunhua Zhou
Hong Kong University of Science and Technology
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ALD-grown Ultrathin AlN Film for Passivation of AlGaN/GaN HEMTs
Sen Huang*, Student Presentation , Hong Kong University of Science and Technology, Institute of Microelectronics Chinese Academy of ScienceQimeng Jiang, The Hong Kong University of Science and TechnologyShu Yang, The Hong Kong University of Science and TechnologyChunhua Zhou, Hong Kong University of Science and Technology