Chunyan Song

Peking University
  • 8.4 Good Repeatability of AlGaN/GaN HEMT on 4” Si Substrate by 5×4” Multi-Wafer Production MOCVD System

    Panfeng Ji, Peking University
    Yuxia Feng, Peking University
    Jianpeng Cheng, Peking University
    Chunyan Song, Peking University
    Xuelin Yang, Peking University
    Bo Shen, Peking University
    Download Paper