Hartmut Witte

Institut for Experimentelle Physik
  • Homogeneity control of powerelectronic device structures by advanced in-situ metrology

    Oliver Schulz, Institut for Experimentelle Physik
    Armin Dadgar, Institut for Experimentelle Physik
    Jonas Hennig, Institut for Experimentelle Physik
    Oliver Krumm, Institut for Experimentelle Physik
    Stephanie Fritze, Institut for Experimentelle Physik
    Jürgen Bläsing, Institut for Experimentelle Physik
    Hartmut Witte, Institut for Experimentelle Physik
    Annette Diez, Institut for Experimentelle Physik
    Alois Krost, Institut for Experimentelle Physik
    LayTec AG, Institut for Experimentelle Physik
    Download Paper