Janet Hopkins

KLA Corporation (SPTS Division)

  • 3.1.4.2024 Plasma Dicing for High Yield SiC Singulation

    A. Croot, KLA Corporation (SPTS Division)
    B. Jones, Swansea University
    J. Mitchell, KLA Corporation (SPTS Division)
    Huma Ashraf, KLA Corporation (SPTS Division)
    M Jennings, Swansea University
    Janet Hopkins, KLA Corporation (SPTS Division)
    O. J. Guy, Centre for Integrative Semiconductor Materials (CISM),
    Loader Loading...
    EAD Logo Taking too long?

    Reload Reload document
    | Open Open in new tab

    Download [1.67 MB]