Kazuyuki Tadatomo

Yamaguchi University

  • 14.10 Fabrication of Hollow Structures Using Atomic Layer Deposition

    Masayuki Nakamura, SAMCO Inc.
    Takayuki Kobayashi, SAMCO Inc.
    Tatsurou Sagawa, SAMCO inc.
    Shin-ichi Motoyama
    Kouichirou Yuki, Yamaguchi University
    Ryo Inomoto, Yamaguchi University
    Osamu Tsuji, Yamaguchi University
    Kazuyuki Tadatomo, Yamaguchi University
    Peter C Wood, SAMCO Inc.
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