Matthew Hardy

US Naval Research Laboratory
  • 13.2 Epitaxial ScAlN Etch-Stop Layers Grown by Molecular Beam Epitaxy for Selective Etching of AlN and GaN

    Matthew Hardy, US Naval Research Laboratory
    Brian Downey, US Naval Research Laboratory
    David Meyer, US Naval Research Laboratory
    Neeraj Nepal, US Naval Research Laboratory
    David Storm, US Naval Research Laboratory
    Douglas Katzer, US Naval Research Laboratory
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  • 8a.3 Epitaxial Lift-off and Transfer of III-N Materials and Devices from SiC

    David Meyer, US Naval Research Laboratory
    Brian Downey, US Naval Research Laboratory
    D. Scott Katzer, U.S. Naval Research Laboratory
    Neeraj Nepal, US Naval Research Laboratory
    Virginia Wheeler, U.S. Naval Research Laboratory
    David Storm, US Naval Research Laboratory
    Matthew Hardy, US Naval Research Laboratory
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