Y. Matsui

Momentive Technologies
  • May 12, 2022 // 3:20pm

    18.3 Heater Performance Improvement with Ceramic Coatings for GaN MOCVD Process

    T. Yamamoto, Momentive Technologies
    B. Kozak, Momentive Technologies
    Y. Morikawa, Momentive Technologies
    T. Higuchi, Momentive Technologies
    Y. Matsui, Momentive Technologies
    D. Sabens, Momentive Technologies
    P. Schmidt-Sane, Momentive Technologies
    J. lennartz, Momentive Technologies
    W. Fan, Momentive Technologies
    C. Chen, Momentive Technologies
    Loader Loading...
    EAD Logo Taking too long?

    Reload Reload document
    | Open Open in new tab

    Download [1.78 MB]

    Download Paper