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10a.2 Nonalloyed Refractory Metals for Self-Aligned InP HBT Emitter Contacts with InAs/InGaAs Emitter Cap
Ardy Winoto, University of Illinois at Urbana Champaign
Junyi Qiu, University of Illinois at Urbana-Champaign
Milton Feng, University of Illinois Urbana-Champaign
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