Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Conference Registration
Hotel Reservation
2024 Advance Program
Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
2022 Conference Collage
Sponsors
Exhibitor
Authors
Digests
Contact
Conference Registration
Hotel Reservation
10.1 Comparison of Charge Dissipation Layers and Dose Sensitivity of PMMA Electron Beam Lithography on Transparent Insulating Substrates such as GaN
Anna Hambitzer, ETH-Zurich
A. Olziersky, IBM-Research Zurich
Tamara Saranovac, ETH-Zurich
Colombo Bolognesi, ETH-Zurich
Download Paper